Generation of Charged Nanoparticles in the Gas Phase and their Contribution to Deposition of GaN Films and Nanostructures during Atmospheric Pressure Chemical Vapor Deposition
| Main Authors: | Jin-Woo Park, Sung-Soo Lee, Nong-Moon Hwang |
|---|---|
| Format: | Article |
| Bahasa: | eng |
| Terbitan: |
, 2014
|
| Online Access: |
https://zenodo.org/record/2655317 |