Test structure for the in-plane locations of project features with nanometer-level accuracy traceable to a coordinate measurement system
| Main Authors: | Cresswell, M. W., Allen, R. A., Linholm, L. W., Ellenwood, C. H., Penzes, W. B., Teague, E. C. |
|---|---|
| Format: | Proceeding Journal |
| Terbitan: |
, 1970
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| Online Access: |
https://zenodo.org/record/1271117 |
Internet
https://zenodo.org/record/1271117Lokasi
| Koleksi | Cognizance Journal of Multidisciplinary Studies |
|---|---|
| Gedung | Cognizance Journal of Multidisciplinary Studies |
| Institusi | ZAIN Publications |
| Kota | Stockholm |
| Provinsi | INTERNASIONAL |
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