ON APPROACH TO ANALYZE NONLINEAR MODEL OF MASS AND HEAT TRANSPORT DURING GAS PHASE EPITAXY. A POSSIBILITY TO IMPROVE PROPERTIES OF FILMS
| Main Authors: | E.L. Pankratov, E.A. Bulaeva |
|---|---|
| Format: | Article |
| Terbitan: |
, 2017
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/1171800 |