Topochemical Synthesis of Epitaxial Silicon Carbide on Silicon
| Main Authors: | Andrey V. Osipov, Sergey A. Kukushkin, Andrey V. Luk'yanov |
|---|---|
| Format: | Article |
| Bahasa: | eng |
| Terbitan: |
, 2016
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/1127312 |