Lokasi: Characterization of 1D Grating Standard for National Laboratory Comparison Using Scanning Electron Microscope

Main Authors:	Nugraha, Asep Ridwan; Puslit Metrologi LIPI, Rahman, Ardi; Puslit Metrologi LIPI, Trisna, Beni Adi; Puslit Metrologi LIPI
Format:	Article info application/pdf Journal
Bahasa:	eng
Terbitan:	LIPI Press, Anggota IKAPI , 2019
Subjects:	Metrology calibration characterization nanometrology pitch measurement SEM uncertainty 1D grating Nanometrology
Online Access:	http://jurnalinstrumentasi.bsn.go.id/index.php/ji/article/view/159 http://jurnalinstrumentasi.bsn.go.id/index.php/ji/article/view/159/pdf_34 http://jurnalinstrumentasi.bsn.go.id/index.php/ji/article/downloadSuppFile/159/44

Koleksi	Jurnal Instrumentasi
Gedung	Perpustakaan Badan Standardisasi Nasional
Institusi	Badan Standardisasi Nasional
Kota	JAKARTA PUSAT
Provinsi	DKI JAKARTA
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