Deposition of Titanium Aluminium Nitride Thin Layer on High Speed Steel Substrate by Radio Frequency Sputtering
| Main Authors: | Wicaksono, Sigit Tri; Materials and Metallurgical Engineering ITS, Prayukti, I G.N.B. Dwistha; Materials and Metallurgical Engineering ITS, Purniawan, Agung; Materials and Metallurgical Engineering ITS, Atmono, Tri Mardji; Pusat Sains dan Teknologi Akselerator, Badan Tenaga Nuklir Nasional (BATAN) |
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| Format: | Article info application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Institut Teknologi Sepuluh Nopember
, 2017
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| Subjects: | |
| Online Access: |
http://iptek.its.ac.id/index.php/jps/article/view/2201 http://iptek.its.ac.id/index.php/jps/article/view/2201/1800 |
Internet
http://iptek.its.ac.id/index.php/jps/article/view/2201http://iptek.its.ac.id/index.php/jps/article/view/2201/1800
Lokasi
| Koleksi | IPTEK Journal of Proceedings Series |
|---|---|
| Gedung | Perpustakaan Institut Teknologi Sepuluh November |
| Institusi | Institut Teknologi Sepuluh November |
| Kota | KOTA SURABAYA |
| Provinsi | JAWA TIMUR |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |